Everbeing C-6 Micro Probe Station - PhysLab

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Everbeing C-6 Micro Probe Station

Home \ facility
Make and Manufacturer Everbeing
Related Manuals Installation Manual
Contact Person Ghulam Sarwar Butt

Electrical characterization is a significant part of microelectronic devices. The input and output contacts of a device under test (DUT) may not be visible with the naked eye therefore it becomes difficult to take their electrical measurements. The Everbeing probe station provides the interface facility to make accurate contact with MEMS, wafer, glass, etc. Probe Station is a combination of a microscope, micropositioners, chuck, tip holder, tungsten tips, vibration-free table, and shielding box. The resolution of the Probe Station is 10 micron.

The four EB-050 micropositioners can position the probe linearly and can move in all 3 individual axes with 0.8 µm resolution and a 12 mm Linear Travel Range. The micropositioners are magnetically mounted with magnetic switches. A 6” stainless steel vacuum chuck can hold the three DUTs separately with the corresponding vacuum switches. DUT size ranges from 2mm to 150mm. It can hold a wafer less than 6”. The fine resolution of the chuck is 1 µm with a theta of 15 degrees and up/down travel range of 6 mm. Triaxial tip holder connectors are used for the DC measurements. The solid Tungsten tips T20-100 ensures good contact with different materials. It is the most common probing tip having a fine end with an angular taper diameter of 10 μm.




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  • Home
  • About Us
    • Overview
    • Centre for Experimental Physics Education (CEPE)
    • Physlab Team
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    • Alumni
    • Open Positions
    • Muhammad Sabieh Anwar (Personal)
  • Academics
    • Lab Courses
    • Lab-I (ENGG-100/PHY-100/200)
    • Lab-II (PHY 300/500)
    • AstroLAB
    • Ibn Sahl Corner for Optics
    • Fast Optics
    • Smart Physics
    • Single Photon Quantum Mechanics Lab
    • Chasing Cosmic Ray Muons at Physlab
    • Stories
    • Physics Studio
    • Research Stories
    • Class Activities
    • Courses Taught
    • Class Demonstrations
    • PhysDiary
    • Health and Safety
    • Lab Safety
    • Workplace Organization
  • Research
    • Research Themes
    • Research Internships
    • Research Stories
    • Physics WorldCup
      • International Young Physicists’ Tournament (IYPT) 2019
      • International Young Physicists’ Tournament (IYPT) 2018
      • International Young Physicists’ Tournament (IYPT) 2016
    • Hunerkada
    • Grants
    • Theses and Reports
    • Scientific Publications
    • Invited Talks (Selected)
  • Outreach
    • Media
      • Lectures, Podcasts and Interviews
      • Videobytes
      • YouTube Channel
      • Visitors
      • Testimonials
    • The Scientific Mind Through the Eyes of a Physics Experimenter
    • National Laboratory Immersion Program
      • First Lahore 2012
      • Second Sukkur 2013
      • Third Lahore 2014
      • Fourth Lahore 2016
    • Labview Workshop 2016
    • Open house
      • 2009-2015
      • Open house 2023
    • Khwarizmi Science Society
    • Helping Pakistan’s Universities
      • National University of Technology (NUTECH) 2019
      • Pakistan Institute of Engineering and Applied Sciences
        (PIEAS) 2019 (Final Phase)
      • Pakistan Institute of Engineering and Applied Sciences
        (PIEAS) 2019 (Phase 2)
      • Pakistan Institute of Engineering and Applied Sciences
        (PIEAS) 2018 (Phase 1)
      • National University of Science & Technology 2016
      • Habib University 2014
      • Preston University 2013
      • Ghulam Ishaque Khan Institute of
        Engineering Sciences and Technology 2011
      • Institute of Space Technology 2010
    • The National STEM School
      • STEM School (2018 – 2019)
      • STEM school (2016 – 2017)
    • Abdus Salam Memorial Lecture Series
  • Facilities
    • Laboratories
    • Equipments
    • Devices & Softwares
      • PhysPlot
      • Physlogger
      • Phystrack
    • Mechanical Workshop
    • Inventory
    • 3D Printed Galleria
    • Forms
    • Equipment Howto’s
  • PhysGPT
  • Contact Us