Plasma Etcher | PhysLab

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Plasma Etcher

Home \ facility
Make and Manufacturer Plasma Tech
Related Manuals PE-50 Plasma Etcher Operational Manual
Contact Person Ghulam Sarwar Butt
The plasma etching is a dry etching process whereby the surface material is removed by plasma processes at low pressure. The PE-50 plasma cleaning system can use up to two gases simultaneously to clean and modify the surface. The type of the active gasses and their ratio is selected depending on the type of material to be etched. The optimum and uniform processing results are obtained when the gas flow rates are selected to maintain the vacuum in the plasma processing chamber in the range of 0.15 to 0.30 Torr. The RF power capability of the plasma etcher is 100 watts which is carefully chosen to avoid the excessive temperature rise in the sample being etched. Active ion species are accelerated towards the sample surface where the adsorption and desorption reaction takes place and the volatile reaction products are exhausted by the vacuum pump.

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  • Home
  • About Us
    • Overview
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    • Alumni
    • Open Positions
    • Muhammad Sabieh Anwar (Personal)
  • Academics
    • Lab Courses
    • Lab-I (PHY 100/200)
    • Lab-II (PHY 300/500)
    • AstroLAB
    • Ibn Sahl Corner for Optics
    • Fast Optics
    • Smart Physics
    • Single Photon Quantum Mechanics Lab
    • Chasing Cosmic Ray Muons at Physlab
    • Stories
    • Physics Studio
    • Research Stories
    • Class Activities
    • Courses Taught
    • Class Demonstrations
    • PhysDiary
    • Health and Safety
    • Lab Safety
    • Workplace Organization
  • Research
    • Research Themes
    • Research Internships
    • Research Stories
    • Physics WorldCup
      • International Young Physicists’ Tournament (IYPT) 2019
      • International Young Physicists’ Tournament (IYPT) 2018
      • International Young Physicists’ Tournament (IYPT) 2016
    • Hunerkada
    • Grants
    • Theses and Reports
    • Scientific Publications
    • Invited Talks (Selected)
  • Outreach
    • The Scientific Mind Through the Eyes of a Physics Experimenter
    • National Laboratory Immersion Program
      • First Lahore 2012
      • Second Sukkur 2013
      • Third Lahore 2014
      • Fourth Lahore 2016
    • Labview Workshop 2016
    • Open House
    • Khwarizmi Science Society
    • Helping Pakistan’s Universities
      • National University of Technology (NUTECH) 2019
      • Pakistan Institute of Engineering and Applied Sciences
        (PIEAS) 2019 (Final Phase)
      • Pakistan Institute of Engineering and Applied Sciences
        (PIEAS) 2019 (Phase 2)
      • Pakistan Institute of Engineering and Applied Sciences
        (PIEAS) 2018 (Phase 1)
      • National University of Science & Technology 2016
      • Habib University 2014
      • Preston University 2013
      • Ghulam Ishaque Khan Institute of
        Engineering Sciences and Technology 2011
      • Institute of Space Technology 2010
    • The National STEM School
      • STEM School (2018 – 2019)
      • STEM school (2016 – 2017)
    • Abdus Salam Memorial Lecture Series
  • Facilities
    • Laboratories
    • Equipments
    • Devices & Softwares
      • PhysPlot
      • Physlogger
      • Phystrack
    • Mechanical Workshop
    • Inventory
    • 3D Printed Galleria
    • Forms
    • Equipment Howto’s
  • Media
    • Videobytes
    • YouTube Channel
    • Visitors
    • Testimonials
  • Contact Us